- AutorIn
- Michael Budnitzki
- Titel
- Constitutive modeling and experimental investigations of phase transitions in silicon under contact loading
- Zitierfähige Url:
- https://nbn-resolving.org/urn:nbn:de:bsz:105-qucosa2-708866
- Schriftenreihe
- Berichte des Instituts für Mechanik und Fluiddynamik ; 17 (2004)
- Erstveröffentlichung
- 2014
- Datum der Einreichung
- 01.07.2014
- Datum der Verteidigung
- 06.10.2014
- Abstract (EN)
- Modeling the interaction of a silicon (Si) surface with a pointed asperity is a crucial step towards the understanding of several phenomena related to machining of this important semiconductor. If subjected to pressure or contact loading, Si undergoes a series of stress-driven phase transitions accompanied by large volume changes. We developed a finite deformation constitutive model that captures the semiconductor-to-metal (cd-Si ➙ β-Si) and metal-to-amorphous (β-Si ➙ a-Si) transitions within the framework of thermodynamics with internal variables. The model was implemented as a user material subroutine for the finite element code Abaqus/Std. in analogy to pressure sensitive, rate independent, non-associated, non-smooth multisurface plasticity. Material parameters were identified from indentation load-displacement curves in (111)-Si using a Berkovich indenter tip. The constitutive model was verified by successfully predicting the load-displacement curves for different indenters, the residual surface profile, as well as the size and shape of the transformation zone under the indenter tip as compared to TEM results.
- Freie Schlagwörter (DE)
- Silizium, Phasenübergänge, Materialmodell, FEM, Indentation
- Freie Schlagwörter (EN)
- silicon, phase transformation, constitutive model, FEM, indentation
- Klassifikation (DDC)
- 660
- Klassifikation (RVK)
- ZN 3460
- Normschlagwörter (GND)
- Silicium
- Phasenumwandlung
- GutachterIn
- Prof. Dr. Meinhard Kuna
- Prof. Dr. Albrecht Bertram
- BetreuerIn Hochschule / Universität
- Prof. Dr. Meinhard Kuna
- Verlag
- TU Bergakademie Freiberg, Freiberg
- Den akademischen Grad verleihende / prüfende Institution
- TU Bergakademie Freiberg, Freiberg
- Version / Begutachtungsstatus
- aktualisierte Version
- URN Qucosa
- urn:nbn:de:bsz:105-qucosa2-708866
- Veröffentlichungsdatum Qucosa
- 13.07.2020
- Dokumenttyp
- Dissertation
- Sprache des Dokumentes
- Englisch